エネルギー物性研究室
■専門分野
電気工学、光・電気・電子材料工学、量子ビーム応用
■研究の内容
■研究室分野キーワード
イオン、電子、光などの量子ビームを細く、細く絞って、モノづくりに応用するための研究をしています。量子ビームはマイクロ、ナノメートルといった微細なモノづくりを実現するために不可欠で、これを物質の表面に照射した時に起こる現象を利用すれば、ミクロなモノづくりが実現できます。教員と学生が一丸となって、ミクロの世界で活躍する光、電子回路、機械をつくるために、毎日研究に取り組んでいます。
電気・電子
■教員研究テーマ
①量子ビーム応用工学②プロトンビームライティングによる微細加工、改質と応用③誘電泳動による微粒子、菌体の捕集、操作
■研究室テーマ
①プロトンビームライティングによる②ガラス・ポリマー・半導体のマイクロマシニングとMEMS応用③誘電泳動による微生物捕集デバイスの作製
■研究パネル
■主な著書
- 電気電子材料工学（2013/09 数理工学社刊行 西川宏之 著）
- EEText 電磁気学（4章、13章）（2007/12 オーム社刊行）
- 誘電体物性（2002/09 培風館刊行）
- Structures and properties of amorphous silicon dioxide -issues on the reliability and novel applications（2001/03 Academic Press刊行「Silicon-Based Materials and Devices” edited by H. S. Nalwa」2巻 p.99～123）
- シリコン熱酸化膜とその界面－基礎物性から超LSIへの応用まで－（1991/07 ㈱リアライズ社刊行）
■主な論文
- Development of embedded Mach忙ehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing（2015/04 Nucl. Instr. Meth. Phys. Res.）
- Fabrication of polydimethylsiloxane microlens arrays on a plastic film by proton beam writing（2014/10 J. Vac. Sci. Technol.）
- Fabrication of curved PDMS microstructures on silica glass by proton beam writing aimed for micro-lens arrays on transparent substrates（2013/07 Nuclear Instruments and Methods in Physics Research B）
- Enhancing proton beam writing system with auto scanning software and stage movement（2013/02 Microelectronic Engineering）
- Control of Refractive Index of Fluorinated Polyimide by Proton Beam Irradiation（2012/12 Jpn. J. Appl. Phys.）
- Visualization of focused proton beam dose distribution by atomic force microscopy using blended polymer films based on polyacrylic acid（2012/09 Journal of Nanoscience and Nanotechnology）
- Fabrication of Poly(9,90-dioctylfluorene)-Based Nano- and Microstructures by Proton Beam Writing（2012/04 Jpn. J. Appl. Phys.）
- Fabrication of Concave and Convex Structure Array Consisted of Epoxy Long-Nanowires by Light and Heavy Ion Beams Lithography（2012/02 Transactions of Materials Research Society of Japan）
- Fabrication of Polymer Optical Waveguides for the 1.5-μm Band Using Focused Proton Beam（2012/01 Key Engineering Materials）
- Microprocessing of Arched Bridge Structures with Epoxy Resin by Proton Beam Writing（2012/01 Journal of Photopolymer Science and Technology）
- Microbeam complex at TIARA: Technologies to meet a wide range of applications（2011/10 Nuclear Instruments and Methods in Physics Research B）
- Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing（2011/09 Transactions of the Materials Research Society of Japan）
- Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species（2011/09 Transactions of the Materials Research Society of Japan）
- Electroforming of Ni mold for imprint lithography using high-aspect-ratio PMMA microstructures fabricated by proton beam writing（2011/08 Microelectronic Engineering）
- Soft-lithographic methods for the fabrication of dielectrophoretic devices using molds by proton beam writing（2010/05 Microelectronic Engineering）
- マイクロビームによる高アスペクト比微細加工（2009/06 放射線と産業）
- Micro-patterning of Siloxane Films by Proton Beam Writing（2009/06 Journal of Photopolymer Science and Technology, Vol.22, pp.239-243(2009)）
- Fabrication and evaluation of 3D-electric micro filters using proton beam writing（2009/04 Microelectronic Engineering）
- Electroplating using high-aspect-ratio microstructures fabricated by proton beam writing（2009/04 Microelectronic Engineering）
- Development of micromachining technology in ion microbeam system at TIARA, JAEA（2009/03 Applied Radiation and Isotopes）
- Fabrication of nanowires by varying energy microbeam lithography using heavy ions at the TIARA（2009/01 Nuclear Instruments and Methods in Physics Research B）
- Applications of microstructures fabricated by proton beam writing to electric-micro filters（2009/01 Nuclear Instruments and Methods in Physics Research B）
- Ni electroplating on a resist micro-machined by proton beam writing（2008/10 Microsystem Technologies）
- Fabrication of three-dimensional structures of resist by proton beam writing（2007/11 Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures）
- Modification of structural and optical properties of silica glass induced by ion microbeam（2007/08 Surface and Coatings Technology）
- Micro-machining of resists on silicon by proton beam writing（2007/07 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms）
- Micro-photoluminescence study on defects induced by ion microbeam in silica glass（2007/04 Journal of Non-Crystalline Solids）
- Correlation between the luminescence properties and the surface structures of submicron silica particles（2007/04 Journal of Non-Crystalline Solids）
- Spatial distribution of irradiation effects on silica glass induced by 15-MeV oxygen ion microbeam（2006/01 Nuclear Instruments and Methods in Physics Research B）
- Effects of Ion Microbeam Irradiation on Silica Glass（2004/03 Transactions of the Materials Research Society of Japan）
- Characterization of ion-implanted silica glass by micro-photoluminescence and Raman spectroscopy（2003/09 Nuclear Instruments and Methods in Physics Research B）
- Characterization of refractive index changes of silica glass induced by ion microbeam（2003/09 Nuclear Instruments and Methods in Physics Research B）
- Characterization of ion-implanted silica glass by vacuum ultraviolet absorption spectroscopy（2002/05 Nuclear Instruments and Methods in Physics Research B）
- Radiation effects and surface deformation of silica by ion microbeam（2002/05 Nuclear Instruments and Methods in Physics Research B）
- Evaluation of silica glasses implanted by high-energy ions using a uv-excited microscopy（2002/05 Nuclear Instruments and Methods in Physics Research B）
- シリカ系フォトニクスガラスの高機能化（2001/08 電気学会論文誌A部門誌）
- Oxygen-deficient centers and excess Si in buried oxide using photoluminescence spectroscopy（1999/12 Physical Review B）
- Defects in thermal oxide studied by photoluminescence spectroscopy（1999/08 Applied Physics Letters）
- Characteristic red photoluminescence band in oxygen-deficient silica glass（1999/07 Journal of Applied Physics）
- Temperature dependence of the lifetime of 4.3-eV photoluminescence in oxygen-deficient amorphous SiO2（1999/01 Physical Review B）
- Structure and generation mechanisms of paramagnetic centers and absorption bands responsible for Ge-doped SiO2 optical-fiber gratings（1998/02 Physical Review B）
- Energy states of Ge-doped SiO2 glass estimated through absorption and photoluminescence（1997/02 Journal of Applied Physics）
- Photoluminescence of oxygen-deficient-type defects in a-SiO2（1997/01 Journal of Non-Crystalline Solids）
- Luminescence properties of sol-gel synthesized silica glass induced by an ArF excimer（1997/01 Journal of Physics D: Applied Physics）
- Thermal annealing behavior of defects induced by ion implantation in thermally grown SiO2 films（1997/01 Microelectrons Engineering）
- Changes in the optical properties of Ge-doped silica glass during exposure to a KrF excimer laser（1997/01 Journal of Non-Crystalline Solids）
- Effect of implanted ion species on the decay of 2.7 eV photoluminescence in thermal（1996/12 Journal of Applied Physics）
- エキシマレーザ，γ線，および機械的応力による非晶質SiO2中の常磁性中心の生成機構（1996/12 電気学会論文誌A）
- 発光減衰曲線の解析によるSiO2の微視的構造の乱雑さの評価（1996/10 電気学会論文誌A）
- Visible photoluminescence from Si clusters in γ-irradiated amorphous SiO2（1996/09 Journal of Applied Physics）
- シリコン酸化膜中の点欠陥の新しい検出法（解説論文）（1996/05 電気学会論文誌A）
- Laser-power dependence of absorption changes in Ge-doped SiO2 glass induced by a KrF excimer laser（1996/04 Physical Review B,）
- Photoluminescence study on point defects in buried SiO2 film formed by implantation of oxygen（1996/01 Journal of Applied Physics）
- Photoluminescence study of defect in ion-implanted thermal SiO2 films（1995/07 ）
- Nature of photoluminescence involving transitions from ground to 4fn-15d1 states in rare-earth-doped glasses（1995/04 Journal of Applied Physics）
- Photoluminescence Study on Point Defects in SIMOX Buried SiO2 Film（1995/01 Materials Science Forum）
- Paramagnetic Defect Centers Induced by Excimer Lasers, γ-Rays, and Mechanical Fracturing in Amorphous SiO2（1995/01 Defect and Diffusion Forum）
- Photoluminescence and electron spin-resonance studies of defects in ion-implanted thermal SiO2 films（1995/01 Materials Science Forum）
- Role of point defects in dielectric breakdown of SiO2 formed by plasma-enhanced chemical vapor deposition（1995/01 Japanese Journal of Applied Physics）
- Optical characteristics of SiO2 formed by plasma-enhanced chemical-vapor deposition of tetraethoxysilane（1994/11 Journal of Applied Physics）
- Gamma-Ray-Induced Loss of Er3+ -Doped Silica-Core Optical Fiber（1994/07 Japanese Journal of Applied Physics）
- Decay kinetics of the 4.4-eV photoluminescence associated with the two states of oxygen-deficient type defect in amorphous SiO2（1994/03 Physical Review Letters）
- Point defects in high purity silica induced by high-dose gamma irradiation（1994/02 Journal of Applied Physics）
- Kinetics of enhanced photogeneration of E' centers in oxygen-deficient silica（1994/01 Journal of Non-Crystalline Solids）
- Correlation of preexisting diamagnetic defect centers with induced paramagnetic defect centers by ultraviolet or vacuum ultraviolet photons in high-purity silica glasses（1993/12 Physical Review B）
- Enhaunced photogeneration of E' centers from neutral oxygen vacancies in the presence of hydrogen in high-purity silica glass（1993/08 Physical Review B）
- Various bonding forms of OH groups in hydrogen-treated silica（1993/08 Journal of Applied Physics）
- Characterization od ClOx radicals in vacuum-ultraviolet-irradiated high-purity silica（1992/10 The American Physical Society）
- Photoluminescence from defect centers in high-purity silica glasses observed under 7.9-eV excitation（1992/01 Physical Review B）
- Si-O-Si strained bond and paramagnetic defect centers induced by mechanical fracturing in amorphous SiO2（1991/11 Journal of Applied Physics）
- Effect of high-temperature treatment on optical-absorption bands in amorphous SiO2（1991/09 Journal of Applied Physics）
- Generation mechanism of photoinduced paramagnetic centers from preexisting precursors in high-purity silicas（1990/04 Physical Review B）
- Defects and optical absorption bands induced by surplus oxygen in high-purity synthetic silica（1988/06 Journal of Applied Physics）
