半導体デバイス研究室
■専門分野
材料物性
■研究の内容
■研究室分野キーワード
■関連業種
本研究室では、Resistance RAM（抵抗変化型メモリ）等の次世代不揮発性メモリデバイス用の新材料を開発することを目的として、様々な半導体薄膜の基礎物性、成膜技術に関する研究を行っています。
材料・化学
電子部品・デバイス・電子回路製造業
金属製品製造業
金属製品製造業
■教員研究テーマ
材料物性、結晶成長
■相談可能な分野
■保有機器
■研究室のスタンス
成膜技術
半導体デバイス
半導体デバイス
電気特性測定装置
■主な著書
- Field Ion Microscopy on Surface Processes（2002/04「Encyclopedia of Surface and Colloid Scienc」）
- 先端材料事典（1995/10 （株）産業調査会,刊行）
■主な論文
- Structure and electrical properties of HfLaOx films for an amorphous high-k gate insulator（2006/04 Applied Physics Letters）
- Moisture-absorption-induced permittivity deterioration and surface roughness enhancement of lanthanum oxide films on silicon（2005/04 Applied Physics Letters）
- Evolution of Leakage Paths in HfO2/SiO2 Stacked Gate Dielectrics: A Stable Direct Observation by Ultrahigh Vacuum Conducting Atomic Force Microscopy（2005/04 Applied Physics Letters）
- Permittivity Increase of Yttriium-Doped HfO2 through Structural Phase Transformation（2005/04 Applied Physics Letters）
- Kinetic Model of Si Oxidation at HfO2/Si Interface with Post Deposition Annealing（2005/04 Japanese Journal of Applied Physics）
- Growth Mechanism Difference of Sputtered HfO2 on Ge and on Si（2004/04 Applied Physics Letters）
- Study on the Growth Mechanism of Pentacene Thin Films by the Analysis of Island Density and Island Size Distribution（2004/04 Applied Physics Letters）
- Step-edge versus interior barriers to atom incorporation at lattice steps（2003/04 Physical Review B）
- New Method for Characterizing Dielectric Properties of High-k Films with Time-Dependent Open-Circuit Potential Measurement（2003/04 Japanese Journal of Applied Physics 2）
- Performance and Degradation in Single Grain-Size Pentacene Thin Film Transistors（2003/04 Japanese Journal of Applied Physics 1）
- Interior Barriers and Dimer Nucleation on Islands（2003/04 Surface Science）
- Cluster diffusion on Pt(111)（2002/04 Surface Science）
- Field-dependent mobility of highly oriented pentacene thin-film transistors（2002/04 Japanese Journal of Applied Physics）
- Non-nearest-neighbor jumps in 2D diffusion : Pd on W(110)（2002/04 Physical Review Letters）
- Atomic jumps in surface self-diffusion: W on W(110)（2002/04 Physical Review B）
- Cluster diffusion and dissociation in the kinetics of layer growth（2000/04 Physical Review Letters）
- First-principles calculations of the magneto-optical Kerr effect in L10-type ordered alloys TM-X (TM=Mn,Fe,Co,X=Pt,Au)（1999/04 Physica B）
- Diffusion and dissociation of Pt clusters on Pt(111)（1999/04 Surface Science）
- Surface defects and bulk defect migration produced by ion bombardment of Si(001)（1999/04 Physical Review Letters）
- Growth and the diffusion of platinum atoms and dimers on Pt(111)（1998/04 Surface Science）
- Step-edge barriers on Pt(111) : An atomistic view（1998/04 Physical Review Letters）
- Magnetic anisotropy and magneto-optical properties of (Co1-xNix)/Pd multilayer（1997/04 IEEE Transactions on Magnetics）
- Step-edge barriers : Truth and kinetic consequences（1997/04 Surface Science）
- Microscopic mechanism of the surfactant epitaxy by molecular dynamics（1996/04 Modelling and Simulation in Materials Science and Engineering）
- Magnetic anisotropy and magneto-optical Kerr effect of Co/Pd1-xAuxmultilayer（1996/04 Journal of Physics: Condensed Matter）
- Theoretical study on the Co layer thickness dependence of the magnetic anisotropy of Pd/Co multilayers（1996/04 Solid State Communications）
- Theoretical study on the strain dependence of the magnetic anisotropy of X/Co (X=Pd, Cu, Ag and Au) metallic multilayers（1996/04 Journal of Applied Physics）
- First-principles calculation of the magnetic anisotropy of Pd/Co(111) and Pd/Co(001) metallic multilayers（1996/04 Proceedings of the International Workshop on Computer Modelling and Simulation for Materials Design）
- Perpendicular magnetic anisotropy of metallic multilayers composed of magnetic layers only: Ni/Co and Ni/Fe multilayers（1996/04 Japanese Journal of Applied Physics）
- Effect of crystal orientation on the magnetic anisotropy of Pd/Co metallic multilayers, Journal of Physics（1996/04 Condensed Matter）
- Magnetoelastic contribution to the interface anisotropy of Pd/Co metallic multilayers（1996/04 Physical Review B）
- Computer simulation of the surfactant epitaxy（1996/04 Modified Embedded Atom Method (MEAM) Computational Materials Science）
- Perpendicular magnetic anisotropy and magneto-optical properties of Co/(Pd-Au) metallic multilayers（1996/04 Journal of the Magnetics Society of Japan）
- Magnetic anisotropy of Au/Co, Au/Fe and Au/(Fe-Co) metallic multilayers: Effect of alloying on the magnetic anisotorpy（1996/04 Journal of the Magnetics Society of Japan）
- RHEED investigation of metal epitaxies and multilayers（1994/04 Microelectronic Engineering）
- First-principles calculation of the magnetic anisotropy energies of iron-based metallic multilayers（1993/04 Modelling and Simulation in Materials Science and Engineering）
- Theoretical study on the magnetic anisotropy of X/Fe (X= Pd； Pt； Ag； Au) metallic multilayers based on LMTO-ASA calculation（1993/04 Journal of Magnetism and Magnetic Materials）
- First-principles calculation of the electronic structure and magnetic anisotropy of Co-based metallic multilayers（1993/04 Journal of Magnetism and Magnetic Materials）
- Theoretical study of magneto-optical properties of X/Co and X/Fe (X= Pt； Pd) multilayers（1993/04 Journal of Magnetism and Magnetic Materials）
- LMTO-ASA calculations of the magnetocrystalline anisotropy energies of X/Co (X= Pd； Pt； Cu； Ag； Au) multilayers（1993/04 Proceedings of CAMSE'92 ( Computer Aided Materials Science and Engineering)）
- Fabrication of Fibonacci metallic superlattices Cu/Ni and Cu/Mo（1993/04 Journal of Magnetism and Magnetic Materials）
- Study on the epitaxial growth of metal on metal using RHEED（1993/01 Journal of Magnetism and Magnetic Materials）
- Computer simulations on the electrical resistivities of metallic superlattices based on simple model（1993/04 Journal of Magnetism and Magnetic Materials）
- Theoretical study on the magnetocrystalline anisotropy of X/Co ( X= Pd； Pt； Cu； Ag； Au ) multilayers（1992/04 Journal of the Physical Society of Japan）
- Structural and magnetic properties of Ag/Cr metallic superlattices（1992/04 Journal of Physics : Condensed Matter）
- Fundamental processes of the epitaxial growth of silver and gold films（1992/04 Applied Surface Science）
- PtMnSb；MnBi；MnPt3の磁気光学Kerrスペクトルの第一原理計算（2000/04 日本応用磁気学会誌）
- L10型規則合金の磁気光学Kerr効果の第一原理計算（1998/04 日本応用磁気学会誌）
- Origin of Permittivity Enhancement of HfSiO and HfON Film with High Temperature Annealing（2005/03 International Conference on Microelectronics and Interfaces(ICMI '06)）
- Effect of seed layers on structure of self-organized Ag nanodots on MgO substrates（2015/06 JAPANESE JOURNAL OF APPLIED PHYSICS）
- Fabrication of self-organized epitaxial fcc-Ag(110)-oriented nanorods by a Ti seed-layer-assisted thermal agglomeration method（2015/03 APPLIED PHYSICS EXPRESS）
- Effect of Ti seed layers on structure of self-organized epitaxial face-centered-cubic-Ag(001) oriented nanodots（2013/12 JOURNAL OF APPLIED PHYSICS）
- Epitaxial growth of fcc-Ag(001) nanodots on MgO(001) substrates via Ti seed layer-assisted agglomeration（2013/12 JOURNAL OF PHYSICS D-APPLIED PHYSICS）
- Novel Crystallization Process for Germanium Thin Films: Surfactant-Crystallization Method（2013/01 JAPANESE JOURNAL OF APPLIED PHYSICS）
- The Influence of Ta underlayers on the structure of TiO2 thin films deposited on an unheated glass substrate（2012/09 APPLIED SURFACE SCIENCE）
- Observation of the creation and annihilation of local current paths in HfO2 thin films on Pt by ultrahigh-vacuum conductive atomic force microscopy : Evidence of oxygen spill over during the forming process（2009/06 Japanese Journal of Applied Physics）
- Band gap enhancement and electrical properties of La2O3 films doped with Y2O3 as high-k gate insulators（2009/04 Applied Physics Letters）
- Dielectric and electrical properties of amorphous La1-XTaXOY films as higher-k gate insulators（2009/03 Journal of Applied Physics）
- Study of La-induced flat band voltage shift in Metal/HfLaOx/SiO2/Si capacitors（2007/11 Japanese Journal of Applied Physics Letters 46）
- Suppression of leakage current and moisture absorption of La2O3 films with ultraviolet ozone post treatment（2007/07 Japanese Journal of Applied Physics Letters 46）
- Higher-k LaYOx films with strong moisture resistance（2006/12 Applied Physics Letters 89）
- Reversible creation and annihilation of a local leakage path in HfO2/GeOx stacked gate dielectrics: A direct observation by ultrahigh vacuum conducting atomic force microscopy（2006/11 Applied Physics Letters 89）
- Moisture-absorption-induced permittivity deterioration and surface roughness enhancement of lanthanum oxide films on silicon（2006/02 Applied Physics Letters 88）
- Energy Level Consideration of Source/Channel/Drain for Performance Enhancements of N- and P-Channel Organic FETs（2005/06 Device Research Conference）
- Far- and Mid- Infrared Absorption Study of HfO2/SiO2/Si System（2005/05 207th Meeting of the Electrochemical Society）
- Interface Reaction of High-k Films with Germanium Substrate（2005/03 2005 MRS Spring Meeting）
- Permittivity Increase of Yttrium-Doped HfO2 through Structural Phase Transformation（2004/12 35th IEEE Semiconductor Interface Specialists Conference (SISC)）
- In-Plane Mobility Anisotropy and Universality Under Uni-Axial Strains in N-and P-MOS Inversion Layers on (100), (110), and (111) Si（2004/12 IEEE International Electron Dvice Meeting (IEDM)）
- Semiconducting Properties of Pentacene Thin Films Studied by Complex Impedance Analysis and Photo-induced Effects（2004/10 206th Meeting of The Electrochemical Society）
- Difference between O2 and N2 Annealing Effects on CVD-SiO2 Film Quality Studied by Open-Circuit Measurement（2004/09 Extended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)）
- Far Infrared Study of Structural Distortion and Transformation of HfO2 by Introducing a Slight Amount Si（2004/09 Extended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)）
- Dielectric Constant Increase of Yttrium-Doped HfO2 by Structural Phase Modification（2004/09 Extended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)）
- Generalized Model of Oxidation Mechanism at HfO2/Si Interface with Post-Deposition Annealing（2004/09 Extended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)）
- Complex Impedance Analysis and Photo-Induced Effects of Semiconducting Pentacene Films（2004/09 Extended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)）
- Accumulated Carrier Density Dependence of Pentacene TFT Mobility Determined by Split C-V Technique（2004/09 Extended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)）
- Stable Observation of the Evolution of Leakage Spots in HfO2/SiO2 stacked structures（2004/09 Extended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)）
- Post-Deposition Annealing Effects on Interface States Generation in HfO2/SiO2/Si MOS Capacitors（2004/09 Extended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)）
- Advantages of Ge (111) Surface for High Quality HfO2/Ge Interface（2004/09 Extended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)）
- In-Plane Anisotropy of MOS Inversion Layer Mobility on Silicon (100), (110) and (111) Surfaces（2004/09 Extended Abstracts of 2004 International Conference on Solid State Devices and Materials (SSDM)）
- Retarded Growth of Sputtered HfO2 Films on Germanium（2004/04 2004 MRS Spring Meeting）
- IR Absorption Study of HfO2 and HfO2/Si Interface Ranging from 200cm-1 to 2000cm-1（2004/04 2004 MRS Spring Meeting）
- Re-Investigation of MOS Inversion Layer Mobility from Non-Universality and Possible New Scattering Mechanism Aspects（2003/12 IEEE International Electron Devices Meeting (IEDM 2003)）
- Further EOT Scaling of Ge/HfO2 over Si/HfO2 MOS Systems（2003/11 International Workshop on Gate Insulator (IWGI2003)）
- Anomalous Growth Temperature Dependence of the Surface Roughness of Pentacene Thin Films（2003/09 Extended Abstracts of 2003 International Conference on Solid State Devices and Materials (SSDM)）
- Re-Examination on the Universality of Si-MOS Inversion Layer Mobility（2003/09 Extended Abstracts of 2003 International Conference on Solid State Devices and Materials (SSDM)）
- Interface Oxidation Mechanism in HfO2/Silicon System with Post-Deposition Annealing（2003/09 Extended Abstracts of 2003 International Conference on Solid State Devices and Materials (SSDM)）
- Oxidation-Induced Damages on Germanium MIS Capacitors with HfO2 Gate Dielectrics（2003/09 Extended Abstracts of 2003 International Conference on Solid State Devices and Materials (SSDM)）
- Electrical Characterization of Metal / Oxide / Pentacene Capacitors（2003/03 Abstracts of 2nd International Conference on Molecular Electronics and Bioelectronics (M&BE2)）
- A New Characterization Technique for Depth-Dependent Dielectric Properties of High-k Films by Open-Circuit Potential Measurement（2003/03 2003 Int. Conference on Characterization and Metrology for ULSI Technology； AIP Conf. Proceedings 550）
- Graphical Approach to Sensitive Detection of Interface Defects in Thin Oxide MOS Capacitors（2002/09 Proceedings of the 2nd International Semiconductor Technology Conference (ISTC-2)）
- New method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement（2002/09 Extended Abstracts of 2002 International Conferenc）
- Peformance and Time-dependent Degradation in a Single Grain-size Pentacene TFTs（2002/09 Extended Abstracts of 2002 International Conference on Solid State Devices and Materials (SSDM)）
- Long jump in surface self-diffusion : W on W(110)（2002/04 Bulletin of the American Physical Society）
- Field-Dependent Mobility of Highly-Oriented Pentacene (C22H14) Thin Film FETs（2001/09 Extended Abstracts of 2001 International Conference on Solid State Devices and Materials (SSDM)）
- Cluster diffusion and dissociation in growth kinetics（2001/04 Bulletin of the American Physical Society）
- Microscopy of Si(001) surface defects produced by keV He ion irradiation at low temperatures（1999/10 American Vacuum Society）
- FIMによるステップエッジバリアの測定（1999/04 固体物理）
- Defects and morphologies produced by keV ion bombardment of Ge and Si surfaces（1999/04 Materials Research Society）
- Direct observation of interlayer transport on Pt(111)（1999/04 Transactions of the Materials Research Society of Japan 24 (1999) 101）
- Si(001) surface morphology during SiGe alloy growth（1999/04 Materials Research Society）
- 原子レベル観察によるPt(111)上のステップエッジバリアに関する研究（1998/12 フィジカル レビュー レターズ）
- Cluster diffusion on Pt(111)（1998/05 American Physical Society）
- Growth and the diffusion of Pt clusters on Pt(111)（1998/04 Materials Research Society）
- Growth and the diffusion of Pt atoms and dimers on Pt(111)（1997/12 Materials Research Society）
- Diffusion of Pt adatoms and dimers on Pt(111)（1997/10 American Vacuum Society）
- Hydrogenation and magnetic properties of Pd/Co multilayers（1997/04 Materials Research Society Symposium Proceedings）
- 金属多層膜、希土類?遷移金属化合物の結晶磁気異方性の第一原理計算（1997/04 日本応用磁気学会誌）
- Molecular static simulation of the effect of alkaline metal impurities on the bonding of Al atoms at the grain boundaries of aluminum（1997/04 Materials Research Society Symposium Proceedings）
- Effect of interstitial atoms ( Na； Mg； Al； Si； P； S and Cl ) on the electronic structure of Al Octahedral Cluster（1996/04 Proceedings of the International Workshop on Computer Modelling and Simulation for Materials Design）
- Computer simulation of segregation of alkaline metals at the grain boundaries in aluminum（1996/04 Proceedings of the International Workshop on Computer Modelling and Simulation for Materials Design）
- 薄膜形成プロセスのコンピューターシミュレーション法（1996/04 日本金属学会会報）
- First-principles calculation of the magnetic anisotropy energies of Ag/Fe(001) and Au/Fe(001) multilayers（1996/04 Journal of the Physical Society of Japan）
- Effect of Fe-Co alloy composition on the magnetic anisotropy of Au/(Fe-Co) metallic multilayers（1996/04 Proceedings of the International Workshop on Computer Modelling Simulation for Materials Design）
- Perpendicular magnetic anisotropy of Co/Pd1-xAux multilayer（1995/04 Proceedings of the Third IUMRS International Conference in Asia）
- Perpendicular magnetic anisotropy of Au/(Fe-Co) metallic multilayers（1995/04 Proceedings of the Third IUMRS International Conference in Asia）
- 第一原理計算による金属人工格子の垂直磁気異方性に関する研究（1993/04 生産研究）
- シミュレーションによる材料開発（1992/04 テレビジョン学会誌）
- Magnetic and transport properties of Ag/Cr metallic superlattices（1991/04 Materials Research Society Symposium Proceedings）
- Surface wave velocity of silver/chromium and gold/chromium superlattice（1991/04 Materials Research Society Symposium Proceedings）
- RHEED intensity oscillation during the epitaxial growth of silver and gold films（1991/04 Materials Research Society Symposium Proceedings）
- Structures of silver/chromium metallic superlattice（1990/04 Materials Research Society Symposium Proceedings）
- Magnetic anisotropy and magneto-optical properties of (Co1-xNix)/Pd multilayer（1970/04 IEEE Transactions on Magnetics）
